JPH0322900Y2 - - Google Patents

Info

Publication number
JPH0322900Y2
JPH0322900Y2 JP1983165021U JP16502183U JPH0322900Y2 JP H0322900 Y2 JPH0322900 Y2 JP H0322900Y2 JP 1983165021 U JP1983165021 U JP 1983165021U JP 16502183 U JP16502183 U JP 16502183U JP H0322900 Y2 JPH0322900 Y2 JP H0322900Y2
Authority
JP
Japan
Prior art keywords
evaporation source
evaporation
base material
space
magnetic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1983165021U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6073216U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16502183U priority Critical patent/JPS6073216U/ja
Publication of JPS6073216U publication Critical patent/JPS6073216U/ja
Application granted granted Critical
Publication of JPH0322900Y2 publication Critical patent/JPH0322900Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Magnetic Record Carriers (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Thin Magnetic Films (AREA)
JP16502183U 1983-10-25 1983-10-25 磁性膜作製装置 Granted JPS6073216U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16502183U JPS6073216U (ja) 1983-10-25 1983-10-25 磁性膜作製装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16502183U JPS6073216U (ja) 1983-10-25 1983-10-25 磁性膜作製装置

Publications (2)

Publication Number Publication Date
JPS6073216U JPS6073216U (ja) 1985-05-23
JPH0322900Y2 true JPH0322900Y2 (en]) 1991-05-20

Family

ID=30361633

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16502183U Granted JPS6073216U (ja) 1983-10-25 1983-10-25 磁性膜作製装置

Country Status (1)

Country Link
JP (1) JPS6073216U (en])

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54116202A (en) * 1978-03-01 1979-09-10 Tdk Corp Production of magnetic recording media
JPS5812317U (ja) * 1981-07-14 1983-01-26 村田　信夫 自動開洋傘の安全装置
JPS58124467U (ja) * 1982-02-17 1983-08-24 日本真空技術株式会社 真空蒸着装置

Also Published As

Publication number Publication date
JPS6073216U (ja) 1985-05-23

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